Manufacturing Technology Today

Megha Agrawal ¹, G. V. Anusha ¹, N. Kusuma ¹, P. V. Shashikumar ¹

Affiliations
1 Central Manufacturing Technology Institute, Bangalore, IN

Abstract

The work presented in this paper involves design, analysis and simulation of micro fixed-fixed beam as a capacitive pressure sensor which is designed by using PolyMUMPs: Polysilicon Multi User MEMS Process. By applying a pressure on the top of fixed-fixed beam, the mechanical force pulls the beam down and increases the capacitance. The change in length of the beam influences the range of applied pressure while the effect of beam width on this is negligible. The PolyMUMPs was developed by MEMSCAP foundry focusing on the fabrication, reliability and cost effectiveness. This presented MEMS pressure sensor is capable of measuring pressure between 0.1MPa to 1.7 MPa which is useful in various field of applications.

Keywords

Polymumps, MEMS, Beam, Pressure Sensor.

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N. Kusuma ¹, E. S. Sujit ²

Affiliations
1 Sensor and Vision Technology Deaprtment Central Manufacturing Technology Institute, Bengaluru, IN
2 Department of Instrumentation and Control Engineering SRM University, Kattankulathur, Tamil Nadu, IN

Abstract

Understanding the tire behavior during tire inflation is critical to design a high- performance tire. To improve handling and response, tire manufacturers need to understand the changes of a tire under various conditions. A MEMS pressure sensor can be placed on the rim to make contact with the tire bead, and can measure the pressure distribution of a tire across the sensor face. Considering the unique nature of each sensor and the trade-offs in design, it is not feasible to follow a standard design approach. Thus, it is useful to derive the specific design, considering number of important factors to arrive at the ‘ideal’ design. The selection of appropriate parameters of piezoresistors such as the shape and the position of the piezoresistor on the pressure sensor diaphragm, thickness of diaphragm are important. This research work shows the scope of using analytical solutions and design techniques for a development of piezoresistive pressure sensor. This research work also focuses on piezoresistive pressure sensor principles, design, modeling, parameters to be considered, materials that can be used in MEMS fabrication. Here the MEMS fabrication process has been discussed in brief pertaining to the application and feature size. Few models of piezoresistive based MEMS pressure sensors have been simulated, analysed and the results are presented.

Keywords

Piezoresistivity, Sensitivity, Pressure Sensor, MEMS.

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Hemant Kumar Singh ¹, Balaji Subramanian ¹, N. Kusuma ², S. Harsha ²

Affiliations
1 Indian Institute of Technology (IIT), Tirupati, IN
2 Central Manufacturing Technology Institute, Bengaluru, IN

Abstract

MEMS offers the uses of the membrane in various applications such as pressure sensors and micro-pumps. The working principle of all these devices is based on the deflection of the membrane due to the application of force. Piezoresistive pressure sensors are simpler to integrate with electronics, and they are inherently more linear than capacitive pressure sensors. The parameter optimization of the membrane is the prime challenge for achieving the best performance of the device. In this paper, the parametric optimization is incorporated for aspect ratio in terms of excellent sensitivity and linearity with the help of the design of experiments (DOE) and ANSYS. It is observed that the aspect ratio of 0.04 gives the maximum deformation with the elastic behaviour, among other sample points of the design.

Keywords

MEMS, Piezoresistive, Sensitivity, Membrane, DOE.

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